Fabrication Suspended High-Aspect-Ratio Parylene Structures for Large Displacement Requirements. International Journal of Automation and Smart Technology, [S. l.], v. 4, n. 2, p. 105–112, 2025. DOI: 10.5875/ausmt.v4i2.343. Disponível em: https://www.jausmt.org/index.php/jausmt/article/view/345.. Acesso em: 1 may. 2026.